![]() 150000004706 metal oxides Chemical class 0.000 description 1.229910044991 metal oxide Inorganic materials 0.000 description 1.238000005516 engineering process Methods 0.000 description 1.238000005859 coupling reaction Methods 0.000 description 1.238000004364 calculation method Methods 0.000 description 1.230000005540 biological transmission Effects 0.000 description 1.238000004458 analytical method Methods 0.000 description 1.238000011179 visual inspection Methods 0.000 description 4.239000012491 analyte Substances 0.000 claims description 2.238000000034 method Methods 0.000 claims abstract description 12.238000003384 imaging method Methods 0.000 claims abstract description 21.239000000758 substrate Substances 0.000 title description 6.238000007689 inspection Methods 0.000 title claims abstract description 7.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to IL188825A priority Critical patent/IL188825D0/en Priority to IL188825 priority Application filed by OVBOTECH Ltd filed Critical OVBOTECH Ltd Priority to PCT/IL2009/000043 priority patent/WO2009090633A2/en Publication of CN101910822A publication Critical patent/CN101910822A/en Application granted granted Critical Publication of CN101910822B publication Critical patent/CN101910822B/en Status Active legal-status Critical Current Anticipated expiration legal-status Critical Links Original Assignee OVBOTECH Ltd Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) 戴维迪 Current Assignee (The listed assignees may be inaccurate.Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active Application number CN2009801024392A Other languages Chinese ( zh) Google Patents CN101910822B - Inspection of a substrate using multiple cameras ![]() CN101910822B - Inspection of a substrate using multiple cameras
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